鉻(Cr) 靶材/蒸鍍顆粒

Cr, wt% minimum	Impurities, ppm, maximum
Cr, wt% minimum	O	N	C	S	Fe	Si	Ni	Al	Cu
99.9%	350	100	200	30	500	100	100	70	40
99.95%	200	50	100	20	250	50	40	30	30
99.99%	100	50	70	20	50	20	5	5	10
99.99%	100	50	70	20	other total impurities 100ppm, maximum

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