Planer :
| Nb | Si | ||
|---|---|---|---|
| poly | single | ||
| Purity | 3N5 ~ 5N | > 4N | > 9N |
| Dimension | < 6,000mm | < 700mm/pcs | |
Rotary :
| Nb | Si | |||
|---|---|---|---|---|
| Extrusion + Bonding | Gas Spray | Poly/Single + Bonding | Vacuum Spray | |
| Purity | 3N5 ~ 5N | > 3N5 O₂/N₂:< 5000ppm |
4N/9N | > 3N5 O₂/N₂:< 1500/500ppm |
| Dimension | < 6,000mm | < 4,000mm | < 2,000mm/pcs | < 4,000mm |
